MMR HALL K2500-5RSLP 80K~730K 上海沃埃得贸易有限公司 WAD(H.K)Co.,LTD 上海市共和新路2449号泛欧现代大厦819室 电话:(021)51806174*807 传真:(021)51806194*803 网址:www.worldwide-china.com Certificate No FM 29473 Any enquiry please contact Mobile:13918893919, apex.xi@worldwide-china.com 如对此有任何疑问请联系 奚雪峰 手机:13918893919, apex.xi@worldwide-china.com WAD Instruments Shanghai Office WAD(H.K)Co.,LTD 02/23/12 10:37 AM MMR? 霍尔效应测试仪器技术参数 1. 设备名称: 霍尔效应测试仪 2. 功能描述: 测量半导体薄膜中载流子类型、载流子浓度、迁移率、电阻率、霍尔系数等参数 3. 设备明细: 3-1 测试范围: Si, SiGe, SiC, GaAs, InGaAs, InP, GaN (N Type & P Type)等材质的半导体薄膜 中载流子类型、载流子浓度、迁移率、电阻率、霍尔系数等参数 3-2 磁场: 3-2-1 磁场强度: 0.5T 电磁体 (0.5T 永磁体 / 1.4T 电磁体 两种磁场可选) 3-2-2 磁场类型: 电磁体 3-2-3 磁场均匀性: 磁场不均匀性<±1 % 3-3 测试样品: 3-3-1 样品测试仓: 全封闭、带玻璃窗口 3-4 温度: 3-4-1 温度区域: 80K ~730K 3-4-2 温控精度: 0.1K 3-4-3 温控稳定性: ±0.1 K 3-5 电阻率范围: 10-6 ~1013 Ohm*cm 3-6 电阻范围: 10 m Ohms~ 10G Ohms 3-7 载流子浓度: 102 ~1022 cm-3 3-8 迁移率: 10-2 ~109 cm2 /volt*sec 3-9 输入电流: 3-9-1 电流范围: 0.1 pA~10mA 3-9-2 电流精度: 2% 3-10 输入电压: 3-10-1 电压范围: ±2.5V,最小可测到6*10-6 V 3-10-2 电压分辨率: 3*10-7 V 3-10-3 电压精度: 2% 4. 仪器优点: 4-1 采用van der Pauw法测试. 4-2 最大可测1cmX1cm样品,提供两种样品装载方式:弹簧探针、引线治具,以及两个杜瓦瓶:全封闭和 带玻璃窗口各一个. 4-3 配备电脑和相应的控制软件,测试过程以及设备内各个单元均由软件控制,永磁体需要手动翻转样 品,电磁场测试过程全自动.测试数据能够方便的储存和导出. 4-4 模块化设计,可升级到温度范围更广、磁场更大的系统,也可升级成塞贝克测量系统. 4-5 测试过程中,由于致冷或加热所引起的样品振动幅度在um量级或更优. 4-6 在同一个样品室下进行变温霍尔效应的测试,最大变温范围70K~730K.避免更换样品室给测试带来 的不方便性和不连贯性,其他品牌低温和高温需要在高温和低温两个样品室下测试. MMR HALL K2500-5RSLP 80K~730K 上海沃埃得贸易有限公司 WAD(H.K)Co.,LTD 上海市共和新路2449号泛欧现代大厦819室 电话:(021)51806174*807 传真:(021)51806194*803 网址:www.worldwide-china.com MMR Hall Effect Measurement System controlled continuously variable temperature MMR可控连续变温霍尔效应测试系统 Certificate No FM 29473 Any enquiry please contact Mobile:13918893919, apex.xi@worldwide-china.com 如对此有任何疑问请联系 奚雪峰 手机:13918893919, apex.xi@worldwide-china.com WAD Instruments Shanghai Office WAD(H.K)Co.,LTD 02/23/12 10:37 AM ? Compact table top design (简洁桌上型设计) ? Two methods of contacting samples:(两种样品接触法) ? Spring Loaded probes (弹簧探针) ? Wire Bonding with Harness (PCB引线治具) ? Ranges Available: ? -203℃ to 307℃ ? -193℃ to 307℃ ? -203℃ to 457℃ ? -193℃ to 457℃ ? 室温 至457℃ ? Ranges Available: ? 70K to 580K ? 80K to 580K ? 70K to 730K ? 80K to 730K ? Room temp to 730K MMR HALL K2500-5RSLP 80K~730K 上海沃埃得贸易有限公司 WAD(H.K)Co.,LTD 上海市共和新路2449号泛欧现代大厦819室 电话:(021)51806174*807 传真:(021)51806194*803 网址:www.worldwide-china.com Hall Electronics Certificate No FM 29473 Any enquiry please contact Mobile:13918893919, apex.xi@worldwide-china.com 如对此有任何疑问请联系 奚雪峰 手机:13918893919, apex.xi@worldwide-china.com WAD Instruments Shanghai Office WAD(H.K)Co.,LTD 02/23/12 10:37 AM ? Information Provided ? Carrier Mobility(载流子迁移率) ? Carrier Concentration(载流子浓度) ? Carrier Types (载体类型) ? n-type or p-type(N型或P型) ? Resistance Measurements(阻值) ? Effect of a Magnetic Field(磁场变换 下结果) ? Effect of Temperature(温度影像下结 果) ? Specifications(产品规格): ? Current Source Range(电流): 1-12 to 0.1 Amps ? Voltage Measurement Range: ±2.5 Volts ? Resistivity Range(电阻率): 10-6 to 1013 Ohm*cm ? Carrier Concentration Range(载 流子浓度): 102 to 1022 cm-3 ? Mobility Range(迁移率) 10-2 to 109 cm2 /volt*sec ? Sample Thickness(样品厚度): 0.001 to 2000 um Three options for magnets to accommodate wide variety of: Samples and experimental requirements/Pricing needs/Space needs (三种不同磁体可选:满足客户各种规格样品、各类测试规格及价格定位需 求) MMR HALL K2500-5RSLP 80K~730K 上海沃埃得贸易有限公司 WAD(H.K)Co.,LTD 上海市共和新路2449号泛欧现代大厦819室 电话:(021)51806174*807 传真:(021)51806194*803 网址:www.worldwide-china.com Components in a Hall System ? Hall Vacuum Chamber 霍尔真空室 ? Hall H50 Electronics 霍尔 H50 电路装置 ? Magnet (optional) 永磁体(选配) ? Magnetic Power Supply (optional) 磁性电源(可选) ·Pure high-pressure gas (greater than 1800 psi) 纯高压气体(大于 1800Psi) -Gas Lines, Pressure Gauge, etc(气管、压力表) ? Filter/Dryer Apparatus 过滤/干燥器 ? Refrigerator 制冷系统 ? Computer (not included) 电脑(客户选配) ? Temperature controller 温度控制器 ? Circuit Breakout Box 电路接口盒 ? Vacuum Pump (not included 真空泵(选配) Gas Lines /Pressure Gauge etc气体/压力表 等?99.998% Prepurified Nitrogen at 2640 psi or higher 压力≥2640Psi 纯度≥99.998%罐装氮气 ? High Pressure Nitrogen Regulator 高压氮气调节阀 ? High Pressure Nitrogen Lines (supplied) 高压氮管路(提供) ? Gas Flow Meter (supplied) 气体流量计(提供) Filter/Dryer Systems过滤干燥系统 Certificate No FM 29473 Any enquiry please contact Mobile:13918893919, apex.xi@worldwide-china.com 如对此有任何疑问请联系 奚雪峰 手机:13918893919, apex.xi@worldwide-china.com WAD Instruments Shanghai Office WAD(H.K)Co.,LTD 02/23/12 10:37 AM MMR HALL K2500-5RSLP 80K~730K 上海沃埃得贸易有限公司 WAD(H.K)Co.,LTD 上海市共和新路2449号泛欧现代大厦819室 电话:(021)51806174*807 传真:(021)51806194*803 网址:www.worldwide-china.com Vacuum Pump and Accessory Kit真空泵及附属配件 Certificate No FM 29473 Any enquiry please contact Mobile:13918893919, apex.xi@worldwide-china.com 如对此有任何疑问请联系 奚雪峰 手机:13918893919, apex.xi@worldwide-china.com WAD Instruments Shanghai Office WAD(H.K)Co.,LTD 02/23/12 10:37 AM Hall System Features and Strengths Feature Strength Wide Range of Temperatures ? Customizable to experiments Configurable System ? Modularity in system ? Readily upgradable ? Affordable Vacuum Operation ? Roughing pumps are readily available in labs ? Air sensitive samples Ambient Pressure Operation (non-corrosive gases) ? Controlled atmosphere experiments with temperature control Easy Sample Exchange ? Ease of Use ? Faster Sample Exchange ? More experiments in less time Two methods of connecting to samples: spring loaded probes and Kapton harness ? No requirements to physically wire bond to sample if not desirable ? Flexibility in sample geometry